https://1drv.ms/w/c/d1884378c6410295/EUpRQIH49nBEpCVD40DAWu8B0mby5B_9yUvOCO9br3Wwpg

<iframe src="https://silicon-bonsai-9e2.notion.site/ebd/1db900f06886816b9115dc7666207207?v=1db900f0688680078a77000c7fe61be3" width="100%" height="600" frameborder="0" allowfullscreen /> Microelectromechanical systems(MEMS): fabrication, design andapplicationsJack W JudyElectrical Engineering Department, University of California, Los Angeles 68-121Engineering IV, 420 Westwood Plaza, Los Ange @les, CA 9